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  CEMOP - Center of Excellence in Microelectronics Optoelectronics and Processes Last modified: 16 June 2003.
 
Research & Development
  List of All International Projects
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Already Concluded
 

List of All National Projects
In Activity
Already Concluded

  Start up projects that gave rise to the appearance of CEMOP
National research projects already concluded

“Position linear sensors for 3D measurements-SELIPOS”
PRAXIS XXI, 3.1A, project nº 3.1/1788/95,
Duration: 04/97 to 09/02.
Partners: CEMOP/UNINOVA: CENIMAT: EID; FACULDADE DE ENGENHARIA DA UNIVERSIDADE DO PORTO (FEUP); FACULDADE DE CIÊNCIAS DA UNIVERSIDADE DO PORTO (FCUP)
Responsible: R. Martins (coordinator)

Objectives
Based on the results achieved within the group in the field of large area sensors, the aim of this project was to develop large area 1D position sensitive detectors and integrated linear array of 1D position sensor (32 lines), aiming to use them for 3D optical inspection systems.

Summary of the main results achieved
The results until now obtained deal mainly with the implementation of materials in which the sensors are based as well the implementation of still large area position sensors. The work concerning the hardware and requires software did also started. More than 27 papers were published in the frame of this project that includes 3 PhD thesis.

Main papers published
R. MARTINS, E. FORTUNATO, J. FIGUEIREDO, F. SOARES, D. BRIDA, V. SILVA, A. CABRITA. “32 linear array position sensitive detector based on pin a-Si:H micro devices”.
Journal of Non-Crystalline Solids, 299-302 (2002) pp. 1283-1288.
R. MARTINS, R., FORTUNATO E. “Thin film position sensitive detectors: from 1D to 3D applications”. “The Technology and Applications of Amorphous Silicon”, ed. by R. Street, Spring Verlagen, pp. 342-403 (2000).

R. MARTINS, P. TEODORO, F. SOARES, I. FERREIRA, N. GUIMARÃES, E. FORTUNATO, J. BORGES, G. JOSÉ, A. GROTH, L. SCHULTZE, D. BERNDT, F. REICHEL AND F. STAM. “Application of amorphous silicon thin film position sensitive detector to optical rulers”.

Advanced Engineering Materials, Vol 3 nº3 (2001) pp. 174-177.
FORTUNATO, E., F. SOARES, P. TEODORO, N. GUIMARÃES, M. MENDES, H. ÁGUAS, V. SILVA and R. MARTINS, Characteristics of a linear array of a-Si:H thin film position sensitive detectors, Thin Solid Films, 337, pp. 222-225 (1998).

FORTUNATO, E., A. Maçarico, I. FERREIRA, J. Carvalho, J. Fidalgo A. Bicho, G. LAVAREDA, M. Quintela, M. Fernandes, F. SOARES, T. Chee, R. MARTINS, Thin films applied to optical position sensitive detectors, Thin Solid Films, 317, pp. 421-424 (1998).

NUNES, P., B. FERNANDES, E. FORTUNATO, P. Vilarinho and R. MARTINS, Performances presented by Zinc Oxide thin films deposited by spray pyrolysis”, Thin Solid Films, 337, pp 176-179 (1999).


“Project and development of a new integrated sensor based on a-Si:H-LISIS”
JD2/DCM/97.
Duration: 01/98 to 06/01
Partners: CENIMAT/FCTUNL: E. FORTUNATO (Co-ordinator)
Responsible: E. Fortunato

Objectives

This project aims to implement the achievements of optical position sensors, but now using a different integrated structure (MIS) to improve the device response time and so, the feasibility to use these device in high speed inspection systems.

Summary of the main results achieved
The results until now achieved correspond to materials implementation and lithographic technique development, resulting in more than 12 communications.

Main papers published
FORTUNATO, E., A. MALIK, A. Sêco, I. FERREIRA, A. Maçarico, G. LAVAREDA, R. MARTINS, Thin Oxide Interface Layers in a-Si:H MIS Structures, J. Non-Crystalline Solids, 227-230, pp. 1230-1234 (1998).

FORTUNATO, E., A. Maçarico, I. FERREIRA, J. Carvalho, J. Fidalgo A. Bicho, G. LAVAREDA, M. Quintela, M. Fernandes, F. SOARES, T. Chee, R. MARTINS, Thin films applied to optical position sensitive detectors, Thin Solid Films, 317, pp. 421-424 (1998).

FORTUNATO, E., R. MARTINS, Role of the collecting resistive layer on the static characteristics of 2D a-Si:H thin film position sensitive detector, in Proc. of MRS Symp. A, Vol. 507, pp. 303-308 (1998).


“New technology to solder crystals with the suppression of Mo discs-SOLTEC”
PRAXIS XXI, 3/3.1/L003-P31B-09/96.
Duration: 04/97 to 06/01.
Partners: COMPONENTES DE SEMICONDUTORES DE PORTUGAL-CSP; FACULDADE DE CIÊNCIAS E TECNOLOGIA DA UNL; FACULDADE DE ENGENHARIA DA UNIVERSIDADE DO PORTO
Responsible: R. Martins

Objectives
This is an industry-oriented project aiming to innovate the conventional soldering process of electronic components of CSP by using a new soldering alloy (Cu/Sn/Cu), Pb free. This new process it will also allow the suppression of the Mo discs and that the components will sustain temperatures larger than the ones of the soft solders (to change from 120ºC to above 300ºC). The expected gains are: (i) to perform the direct join of the crystal to the stud; (ii) to eliminate the brazing operation and the Mo discs; (iii) to allow the all assembly process to be performed at much lower temperatures and so to reduce possible thermal induced defects to the devices, enhancing so the yield and the reliability of the process; (iv) to reduce energy costs and environment contaminants (Pb).

Summary of the main results achieved

The main technical goals of this project were fully obtained, as can be taken from the set of papers published.

Main papers published
GONÇALVES, C., J. FERREIRA, E. FORTUNATO, I. FERREIRAM, R. MARTINS, A.P. Marvão, J.I. Martins, T. Harder and R. Oppelt, New Metallurgical Systems for electronic soldering applications, - accepted for publication in Sensors & Actuators, A (1999).

H. SEIROCO, M. VICENTE, J. FERREIRA, F.B. FERNANDES, A. P. MARVÃO, J.I. MARTINS, E. FORTUNATO, R. MARTINS. New Adhesion Process based in lead free solder applied in electronic power devices.
Key Engineering Materials, 230-232 (2002) pp. 92-95

J. FERREIRA, H. SEIROCO, F.BRAZ FERNANDES, R. MARTINS, E. FORTUNATO, A.P. MARVÃO, J.I. MARTINS. “Production of low cost contacts and joins for large area devices by electrodeposition of Cu and Sn”.
Applied Surface Science, 168 (2000) pp. 292-295.

J. FERREIRA, B. FERNANDES, C. GONÇALVES, P. NUNES, E. FORTUNATO, R. MARTINS, J.I. MARTINS, A.P. MARVÃO. “Morphological and structural characteristics presented by the Cu-Sn-Cu metallurgical system used in electronic joints”.
Materials Science & Engineering A, 288, (2000), pp. 248-252.

R. MARTINS, J. FERREIRA, C. GONÇALVES, P. NUNES, E. FORTUNATO, A.P. MARVÃO, J.I. MARTINS. “Role of soldering parameters on the electrical performances presented by Cu-Sn-Cu joints used in power diodes”.
Materials Science & Engineering A, 288, (2000), pp. 275-279.


“Eco Climate systems for industrial applications- ECOCLIMAT”
PEDIP II.
Duration: 04/98 to 12/01.
Partners: ATECNIC; FCTUNL; FRAUNHOFFER INSTITUTE (DE); IST (PT); FUC (PT).

Objectives
This is an industry oriented project that aims to develop technologies that will lead to the production of self sustained systems for environmental applications, such as a new conditioning pumping system and integrated thermo photovoltaic panels for house applications. The participation of CEMOP/CENIMAT deals with the implementation of the solar cells and their corresponding test and certification.

Summary of the main results achieved
A thermo photovoltaic prototype unit integrating planar concentrators.


“Image linear sensors based on amorphous silicon - SELISA”
STRIDE, nº STRDA/C/CTM/66173/92 (1992/94).
Duration: 03/92 to 06/94
Partners: UNINOVA/CEMOP and FCTUNL.
Responsible: R. Martins (coordinator)

Objectives
The aim of this project was to develop arrays/matrix of amorphous silicon photodiodes to be used in image scanning applications. The main work was centred in developing the microelectronic technologies that allow the processing of such devices, besides developing silicon carbide alloys aiming their application as light emitting diodes.

Summary of the results achieved
The basic concepts related to the project objectives were reached special the know-how of the physics behind the devices and the materials produced, as well as some laboratory demonstrators.

Main papers published

M. VIEIRA, E. FORTUNATO, C.N. CARVALHO, G. LAVAREDA AND R. MARTINS. “Influence of the Photodegradation on the µ? and Microstructure of PIN a-Si:H Devices”. Vacuum, vol. 45 n.10/11, (1994), pp. 1109-1111.

M. VIEIRA, E. FORTUNATO, G. LAVAREDA, C.N. CARVALHO AND R. MARTINS. “Light and Temperature Effect on PIN a-Si:H Device Performance”. Vacuum, vol. 45 n.10/11, (1994), pp. 1147-1149.

E. FORTUNATO, G. LAVAREDA, M. VIEIRA, R. MARTINS, L. FERREIRA. “Application of Thin Film Technology to Optical Sensors”. Vacuum, vol. 45 n.10/11, (1994), pp. 1151-1154.

M. VIEIRA, A. FANTONI, A. MAÇARICO, F. SOARES AND R. MARTINS. “a-Si:H optical speed detector based on the flying spot technique”. 1st WCPEC (Proc. 24th IEEE PVSC 1994) ed. IEEE EDS, pp. 571-574 (1994).

M. VIEIRA, A. FANTONI, R. MARTINS, V. CHU, S. KOYNOV, F. WANG, S. GREBNER, R. SCHWARZ. “Comparison of diffusion length measurements from the flying spot technique and the photocarrier grating method in amorphous thin films”. 1st WCPEC (Proc. 24th IEEE PVSC 1994) ed. IEEE EDS, pp. 575-578 (1994).

R. MARTINS, E. FORTUNATO, A. BICHO AND G. LAVAREDA. “Role of the lateral leakage current on amorphous silicon solar cells”. 1st WCPEC (Proc. the 24th IEEE PVSC 1994) ed. IEEE EDS, pp. 587-590 (1994).

E. FORTUNATO, C.N. CARVALHO, A. BICHO AND R. MARTINS. “Effect of Different TCO Interfaces on the Performances Presented by Hydrogenated Amorphous Silicon P-I-N Solar Cells”. 1st WCPEC (Proc. 24th IEEE PVSC 1994) ed. IEEE EDS, pp. 646-649 (1994).


“Photovoltaic Modules and Particle detectors based on amorphous silicon devices”
EUREKA, nº 0366 - PARTIDEC (1990/93).
Duration:03/1990 to 12/93
Partners: FCTUNL (PT), Portsol (PT); Semilab (Hungria); U. Torino (IT); CIEMAT (SP).
Responsible: L. Guimarães

Objectives
The aim of this project was to establish a network able to deal with the application of the emergent device applications of nip a-Si:H structures in solar cells and particle detection. This implies the implementation of production systems and the development of new tools for device quality control.

Summary of the results achieved
Out of this project, new characterization tools and implementation of an in-line production chamber for large area devices, manual controlled, were produced.

Main publications
R. MARTINS, I. FERREIRA, N. CARVALHO, L. GUIMARÃES. “Engineering of Plasma Deposition Systems Used for Producing Large Area a-Si:H Devices”. J. of Non-Cryst. Solids, Vols. 137&138, (1991), pp. 757-760.

M. VIEIRA, R. MARTINS, E. FORTUNATO, F. SOARES, L. GUIMARÃES. “a-Si:H Ambipolar Diffusion Length and Effective Lifetime Measured by Flying Spot (FST) and Spectral Photovoltage (SPT) Techniques”. J. of Non-Cryst. Solids, Vols. 137&138, (1991), pp. 479-482.

R. MARTINS, M. VIEIRA, E. FORTUNATO, I. FERREIRA, F. SOARES, L. GUIMARÃES. “Determination of a-Si:H Films Quality Through FST and SCLC Techniques”. MRS Symp. Amorphous Silicon Technology, Vol. 192, pp. 169-174 (1990).

R. MARTINS, L. RODRIGUES, M. VIEIRA, E. FORTUNATO, M. SANTOS, E. DIRANI, N. CARVALHO, I. BAÍA, L. GUIMARÃES. “The role of the species formed in PECVD systems on the density of states of a-Si films”. MRS Symp. Amorphous Silicon Technology, Vol. 192, pp. 175-180 (1990).


“Microelectronics of thin films”
JNICT, nº 87 618 (1987/90).
Duration: 07/87 to 12/90
Partners: FCTUNL and UNINOVA/CEMOP.
Responsible: R. Martins

Objectives
It is a basic project whose main goal is to use and to adapt conventional microelectronics processes used on crystalline silicon on amorphous silicon.

Summary of the results achieved
The know of the technology was clear achieved and defined the main ideas to build the first clean room for microelectronic processes in Portugal, to be also used for education purposes.
 

 
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