| “Position
linear sensors for 3D measurements-SELIPOS”
PRAXIS XXI, 3.1A, project nº 3.1/1788/95,
Duration: 04/97 to 09/02.
Partners: CEMOP/UNINOVA: CENIMAT: EID; FACULDADE DE
ENGENHARIA DA UNIVERSIDADE DO PORTO (FEUP); FACULDADE
DE CIÊNCIAS DA UNIVERSIDADE DO PORTO (FCUP)
Responsible: R. Martins (coordinator)
Objectives
Based on the results achieved within the group in the
field of large area sensors, the aim of this project
was to develop large area 1D position sensitive detectors
and integrated linear array of 1D position sensor (32
lines), aiming to use them for 3D optical inspection
systems.
Summary of the main results
achieved
The results until now obtained deal mainly with the
implementation of materials in which the sensors are
based as well the implementation of still large area
position sensors. The work concerning the hardware and
requires software did also started. More than 27 papers
were published in the frame of this project that includes
3 PhD thesis.
Main papers published
R. MARTINS, E. FORTUNATO, J. FIGUEIREDO, F. SOARES,
D. BRIDA, V. SILVA, A. CABRITA. “32 linear array
position sensitive detector based on pin a-Si:H micro
devices”.
Journal of Non-Crystalline Solids, 299-302 (2002) pp.
1283-1288.
R. MARTINS, R., FORTUNATO E. “Thin film position
sensitive detectors: from 1D to 3D applications”.
“The Technology and Applications of Amorphous
Silicon”, ed. by R. Street, Spring Verlagen, pp.
342-403 (2000).
R. MARTINS, P. TEODORO, F. SOARES, I. FERREIRA, N. GUIMARÃES,
E. FORTUNATO, J. BORGES, G. JOSÉ, A. GROTH, L.
SCHULTZE, D. BERNDT, F. REICHEL AND F. STAM. “Application
of amorphous silicon thin film position sensitive detector
to optical rulers”.
Advanced Engineering Materials, Vol 3 nº3 (2001)
pp. 174-177.
FORTUNATO, E., F. SOARES, P. TEODORO, N. GUIMARÃES,
M. MENDES, H. ÁGUAS, V. SILVA and R. MARTINS,
Characteristics of a linear array of a-Si:H thin film
position sensitive detectors, Thin Solid Films, 337,
pp. 222-225 (1998).
FORTUNATO, E., A. Maçarico, I. FERREIRA, J. Carvalho,
J. Fidalgo A. Bicho, G. LAVAREDA, M. Quintela, M. Fernandes,
F. SOARES, T. Chee, R. MARTINS, Thin films applied to
optical position sensitive detectors, Thin Solid Films,
317, pp. 421-424 (1998).
NUNES, P., B. FERNANDES, E. FORTUNATO, P. Vilarinho
and R. MARTINS, Performances presented by Zinc Oxide
thin films deposited by spray pyrolysis”, Thin
Solid Films, 337, pp 176-179 (1999).
“Project
and development of a new integrated sensor based on
a-Si:H-LISIS”
JD2/DCM/97.
Duration: 01/98 to 06/01
Partners: CENIMAT/FCTUNL: E. FORTUNATO (Co-ordinator)
Responsible: E. Fortunato
Objectives
This project aims to implement the achievements of optical
position sensors, but now using a different integrated
structure (MIS) to improve the device response time
and so, the feasibility to use these device in high
speed inspection systems.
Summary
of the main results achieved
The results until now achieved correspond to materials
implementation and lithographic technique development,
resulting in more than 12 communications.
Main
papers published
FORTUNATO, E., A. MALIK, A. Sêco, I. FERREIRA,
A. Maçarico, G. LAVAREDA, R. MARTINS, Thin Oxide
Interface Layers in a-Si:H MIS Structures, J. Non-Crystalline
Solids, 227-230, pp. 1230-1234 (1998).
FORTUNATO, E., A. Maçarico, I. FERREIRA, J. Carvalho,
J. Fidalgo A. Bicho, G. LAVAREDA, M. Quintela, M. Fernandes,
F. SOARES, T. Chee, R. MARTINS, Thin films applied to
optical position sensitive detectors, Thin Solid Films,
317, pp. 421-424 (1998).
FORTUNATO, E., R. MARTINS, Role of the collecting resistive
layer on the static characteristics of 2D a-Si:H thin
film position sensitive detector, in Proc. of MRS Symp.
A, Vol. 507, pp. 303-308 (1998).
“New
technology to solder crystals with the suppression of
Mo discs-SOLTEC”
PRAXIS XXI, 3/3.1/L003-P31B-09/96.
Duration: 04/97 to 06/01.
Partners: COMPONENTES DE SEMICONDUTORES DE PORTUGAL-CSP;
FACULDADE DE CIÊNCIAS E TECNOLOGIA DA UNL; FACULDADE
DE ENGENHARIA DA UNIVERSIDADE DO PORTO
Responsible: R. Martins
Objectives
This is an industry-oriented project aiming to innovate
the conventional soldering process of electronic components
of CSP by using a new soldering alloy (Cu/Sn/Cu), Pb
free. This new process it will also allow the suppression
of the Mo discs and that the components will sustain
temperatures larger than the ones of the soft solders
(to change from 120ºC to above 300ºC). The
expected gains are: (i) to perform the direct join of
the crystal to the stud; (ii) to eliminate the brazing
operation and the Mo discs; (iii) to allow the all assembly
process to be performed at much lower temperatures and
so to reduce possible thermal induced defects to the
devices, enhancing so the yield and the reliability
of the process; (iv) to reduce energy costs and environment
contaminants (Pb).
Summary of the main results achieved
The main technical goals of this project were fully
obtained, as can be taken from the set of papers published.
Main papers published
GONÇALVES, C., J. FERREIRA, E. FORTUNATO, I.
FERREIRAM, R. MARTINS, A.P. Marvão, J.I. Martins,
T. Harder and R. Oppelt, New Metallurgical Systems for
electronic soldering applications, - accepted for publication
in Sensors & Actuators, A (1999).
H. SEIROCO, M. VICENTE, J. FERREIRA, F.B. FERNANDES,
A. P. MARVÃO, J.I. MARTINS, E. FORTUNATO, R.
MARTINS. New Adhesion Process based in lead free solder
applied in electronic power devices.
Key Engineering Materials, 230-232 (2002) pp. 92-95
J. FERREIRA, H. SEIROCO, F.BRAZ FERNANDES, R. MARTINS,
E. FORTUNATO, A.P. MARVÃO, J.I. MARTINS. “Production
of low cost contacts and joins for large area devices
by electrodeposition of Cu and Sn”.
Applied Surface Science, 168 (2000) pp. 292-295.
J. FERREIRA, B. FERNANDES, C. GONÇALVES, P. NUNES,
E. FORTUNATO, R. MARTINS, J.I. MARTINS, A.P. MARVÃO.
“Morphological and structural characteristics
presented by the Cu-Sn-Cu metallurgical system used
in electronic joints”.
Materials Science & Engineering A, 288, (2000),
pp. 248-252.
R. MARTINS, J. FERREIRA, C. GONÇALVES, P. NUNES,
E. FORTUNATO, A.P. MARVÃO, J.I. MARTINS. “Role
of soldering parameters on the electrical performances
presented by Cu-Sn-Cu joints used in power diodes”.
Materials Science & Engineering A, 288, (2000),
pp. 275-279.
“Eco
Climate systems for industrial applications- ECOCLIMAT”
PEDIP II.
Duration: 04/98 to 12/01.
Partners: ATECNIC; FCTUNL; FRAUNHOFFER INSTITUTE (DE);
IST (PT); FUC (PT).
Objectives
This is an industry oriented project that aims to develop
technologies that will lead to the production of self
sustained systems for environmental applications, such
as a new conditioning pumping system and integrated
thermo photovoltaic panels for house applications. The
participation of CEMOP/CENIMAT deals with the implementation
of the solar cells and their corresponding test and
certification.
Summary
of the main results achieved
A thermo photovoltaic prototype unit integrating planar
concentrators.
“Image
linear sensors based on amorphous silicon - SELISA”
STRIDE, nº STRDA/C/CTM/66173/92 (1992/94).
Duration: 03/92 to 06/94
Partners: UNINOVA/CEMOP and FCTUNL.
Responsible: R. Martins (coordinator)
Objectives
The aim of this project was to develop arrays/matrix
of amorphous silicon photodiodes to be used in image
scanning applications. The main work was centred in
developing the microelectronic technologies that allow
the processing of such devices, besides developing silicon
carbide alloys aiming their application as light emitting
diodes.
Summary
of the results achieved
The basic concepts related to the project objectives
were reached special the know-how of the physics behind
the devices and the materials produced, as well as some
laboratory demonstrators.
Main papers published
M. VIEIRA, E. FORTUNATO, C.N. CARVALHO,
G. LAVAREDA AND R. MARTINS. “Influence of the
Photodegradation on the µ? and Microstructure
of PIN a-Si:H Devices”. Vacuum, vol. 45 n.10/11,
(1994), pp. 1109-1111.
M. VIEIRA, E. FORTUNATO, G. LAVAREDA, C.N. CARVALHO
AND R. MARTINS. “Light and Temperature Effect
on PIN a-Si:H Device Performance”. Vacuum, vol.
45 n.10/11, (1994), pp. 1147-1149.
E. FORTUNATO, G. LAVAREDA, M. VIEIRA, R. MARTINS, L.
FERREIRA. “Application of Thin Film Technology
to Optical Sensors”. Vacuum, vol. 45 n.10/11,
(1994), pp. 1151-1154.
M. VIEIRA, A. FANTONI, A. MAÇARICO, F. SOARES
AND R. MARTINS. “a-Si:H optical speed detector
based on the flying spot technique”. 1st WCPEC
(Proc. 24th IEEE PVSC 1994) ed. IEEE EDS, pp. 571-574
(1994).
M. VIEIRA, A. FANTONI, R. MARTINS, V. CHU, S. KOYNOV,
F. WANG, S. GREBNER, R. SCHWARZ. “Comparison of
diffusion length measurements from the flying spot technique
and the photocarrier grating method in amorphous thin
films”. 1st WCPEC (Proc. 24th IEEE PVSC 1994)
ed. IEEE EDS, pp. 575-578 (1994).
R. MARTINS, E. FORTUNATO, A. BICHO AND G. LAVAREDA.
“Role of the lateral leakage current on amorphous
silicon solar cells”. 1st WCPEC (Proc. the 24th
IEEE PVSC 1994) ed. IEEE EDS, pp. 587-590 (1994).
E. FORTUNATO, C.N. CARVALHO, A. BICHO AND R. MARTINS.
“Effect of Different TCO Interfaces on the Performances
Presented by Hydrogenated Amorphous Silicon P-I-N Solar
Cells”. 1st WCPEC (Proc. 24th IEEE PVSC 1994)
ed. IEEE EDS, pp. 646-649 (1994).
“Photovoltaic
Modules and Particle detectors based on amorphous silicon
devices”
EUREKA, nº 0366 - PARTIDEC (1990/93).
Duration:03/1990 to 12/93
Partners: FCTUNL (PT), Portsol (PT); Semilab (Hungria);
U. Torino (IT); CIEMAT (SP).
Responsible: L. Guimarães
Objectives
The aim of this project was to establish a network able
to deal with the application of the emergent device
applications of nip a-Si:H structures in solar cells
and particle detection. This implies the implementation
of production systems and the development of new tools
for device quality control.
Summary
of the results achieved
Out of this project, new characterization tools and
implementation of an in-line production chamber for
large area devices, manual controlled, were produced.
Main
publications
R. MARTINS, I. FERREIRA, N. CARVALHO, L. GUIMARÃES.
“Engineering of Plasma Deposition Systems Used
for Producing Large Area a-Si:H Devices”. J. of
Non-Cryst. Solids, Vols. 137&138, (1991), pp. 757-760.
M. VIEIRA, R. MARTINS, E. FORTUNATO, F. SOARES, L. GUIMARÃES.
“a-Si:H Ambipolar Diffusion Length and Effective
Lifetime Measured by Flying Spot (FST) and Spectral
Photovoltage (SPT) Techniques”. J. of Non-Cryst.
Solids, Vols. 137&138, (1991), pp. 479-482.
R. MARTINS, M. VIEIRA, E. FORTUNATO, I. FERREIRA, F.
SOARES, L. GUIMARÃES. “Determination of
a-Si:H Films Quality Through FST and SCLC Techniques”.
MRS Symp. Amorphous Silicon Technology, Vol. 192, pp.
169-174 (1990).
R. MARTINS, L. RODRIGUES, M. VIEIRA, E. FORTUNATO, M.
SANTOS, E. DIRANI, N. CARVALHO, I. BAÍA, L. GUIMARÃES.
“The role of the species formed in PECVD systems
on the density of states of a-Si films”. MRS Symp.
Amorphous Silicon Technology, Vol. 192, pp. 175-180
(1990).
“Microelectronics
of thin films”
JNICT, nº 87 618 (1987/90).
Duration: 07/87 to 12/90
Partners: FCTUNL and UNINOVA/CEMOP.
Responsible: R. Martins
Objectives
It is a basic project whose main goal is to use and
to adapt conventional microelectronics processes used
on crystalline silicon on amorphous silicon.
Summary
of the results achieved
The know of the technology was clear achieved and defined
the main ideas to build the first clean room for microelectronic
processes in Portugal, to be also used for education
purposes.
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